| 1. | Methods of measurement of the performance characteristics of tubo - molecular pumps
涡轮分子泵性能测试方法 |
| 2. | Methods of measurement of the performance characteristics of turbo - molecular pumps
涡轮分子泵性能测试方法 |
| 3. | Vertical turbo molecular pump
立式涡轮分子泵 |
| 4. | Turbo molecular pump
涡轮分子泵 |
| 5. | Vacuum technology . methods of measurement of the performance characteristics of turbo - molecular pumps
真空技术.涡轮分子泵功能特性的测定 |
| 6. | Our maintenance team provides a whole - range of services for users of dry pumps and turbo molecular pumps . a detailed report will be conducted before maintenance while test reports of different testing standards will be provided afterwards . requests for from all fields are welcomed
本维修团队，可针对客户的dry pump turbo molecular pump提供全方位服务，进厂维修帮浦会做详尽报告维修完毕依照不同的测试标准提供测试报告，欢迎各界提出维修需求。 |
| 7. | Firstly , considering the molecular pump is small and the elimination of heat condition is bad , this paper presents the structure of the mb , including the material of the rotor and stator , the number of magnetic poles , the stator slot shape of mb , the layout of the magnetic poles , the coins winding and so on
首先综合考虑了分子泵体积小、磁轴承散热条件不好的特点,设计了分子泵磁悬浮轴承的结构,选择了轴承铁芯的材料,设计了磁极的布置、槽的形状、磁极数目和线圈缠绕方式。 |
| 8. | The traditional molecular pump with popular bearing can not meet the challenge of semiconductor manufacturing because of the vibration , short life , unpure vacuum and so on . so it is very important to design the magnetic bearing and power amplifier for molecular pump
本课题研究的目的是,解决传统轴承型分子泵应用在半导体制造行业时出现转速低、寿命短、真空不洁净等问题,设计分子泵的磁悬浮轴承结构和功率放大器,对实现分子泵在半导体工业中的良好应用有着重要的意义。 |
